Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1998-10-08
2000-08-29
Metjahic, Safet
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324760, G01R 3102
Patent
active
061114219
ABSTRACT:
A probe method is disclosed which inspects the electrical characteristics of an object to be inspected (wafer W) by bringing the electrodes of the object to be inspected placed on a main chuck and probes of a probe card into contact with each other. The main chuck is movable in the X, Y, Z, and .theta. directions and heated to a predetermined inspection temperature. The main chuck retreats to a position separated from the inspection position during high-temperature inspection. The time (retreat time) during which the main chuck stays retreated is calculated by a retreat time calculating mechanism. A preheat execute determination mechanism determines whether the probe card and probes are to be preheated on the basis of the retreat time. When it is determined that preheating is necessary, a preheat time calculation mechanism calculates the preheat execute time. Preheating is executed during the preheat execute time determined by a preheat end determination mechanism, and misalignment of the probes is corrected.
REFERENCES:
patent: 5517126 (1996-05-01), Yamaguchi
patent: 5912555 (1999-06-01), Akaike et al.
patent: 5945834 (1999-08-01), Nakata et al.
Fukasawa Yukihiko
Takahashi Shigeaki
Kerveros James C.
Metjahic Safet
Tokyo Electron Limited
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