Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-04-23
1992-09-01
Wieder, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158F, 324 725, 357 68, G01R 100, G01R 102
Patent
active
051442280
ABSTRACT:
A probe interface assembly connects a set of signal lines and a set of power lines from a circuit tester to one integrated circuit (IC) chip disposed among multiple circuit chips on a semiconductor wafer. The assembly includes a plurality of electrically conductive planes including metal mesh and conductive strips which are spaced apart by ceramic planes contiguous the conductive planes. The signal lines and the power lines enter the assembly with relatively large spacing at an input plane facing the tester, and exit the assembly with relatively small spacing at an output plane facing the chip. Within the assembly, each power line branches into a plurality of conducting vias for reducing resistance and inductance of the power lines. Connection of the vias to the power lines is accomplished by conductive planes near the output plane. Other ones of the conductive planes, near the input plane, interconnect input and output signal lines. Ground planes are interposed between power planes and signal planes.
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Papae Donald J.
Sorna Michael A.
Burns William J.
International Business Machines - Corporation
Peterson Jr. Charles W.
Wieder Kenneth A.
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