Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With waveguide or long line
Reexamination Certificate
1997-12-31
2001-05-29
Metjahic, Safet (Department: 2858)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With waveguide or long line
C324S754090
Reexamination Certificate
active
06239587
ABSTRACT:
TECHNICAL FIELD OF THE INVENTION
This invention relates to the field of current and voltage detectors, and more specifically to a probe for monitoring radio frequency voltage and current.
BACKGROUND OF THE INVENTION
Various electronic devices, including plasma processing tools used in the semiconductor industry, operate in the radio frequency (RF) band. In operation, these devices generate RF power. To effectively channel that RF power, information concerning its voltage, current, and phase are needed. While devices currently exist to measure the voltage, current, and phase in an RF system, they all suffer from one or more of the following drawbacks. First, these detectors have impedances which differ from the impedance in the transmission line. This results in poor readings due to reflections and power losses. Second, these detectors are typically large, cumbersome devices. Also, the designs are usually difficult to conveniently manufacture. Therefore, it is desirable to have a detector which avoids reflections and power losses due to impedance mismatching.
SUMMARY OF THE INVENTION
From the foregoing, it may be appreciated that a need has arisen for a device that matches an impedance of a transmission line in order to obtain accurate voltage, current, and phase measurements. In accordance with the present invention, a probe for monitoring radio frequency voltage and current is provided which substantially eliminates or reduces disadvantages and problems associated with prior radio frequency probes.
According to an embodiment of the present invention, there is provided a probe for monitoring radio frequency voltage and current which includes a body having an input side and an output side. The input and the output side are operable to accept a transmission line carrying electricity. A cavity runs from the input side to the output side of the body. An insulator having a first slit and a second slit cut into its length fills the cavity of the body. An inner conductor located in the center of the insulator extends throughout the length of the insulator, from the input side of the body to the output side of the body. The body has a first aperture that aligns with the first slit of the insulator and a second aperture that aligns with the second slit of the insulator, respectively.
The present invention provides various technical advantages over conventional radio frequency probes. For example, one technical advantage is to provide a precision compact probe for measuring radio frequency voltage, current and phase that operates at the same impedance as a radio frequency generator and its associated transmission line. Another technical advantage is the ability to easily construct and calibrate the probe. Other technical advantages are readily apparent to one skilled in the art from the following figures, description, and claims.
REFERENCES:
patent: 3037167 (1962-05-01), Hovda et al.
patent: 4080566 (1978-03-01), Mecklenburg
patent: 5021734 (1991-06-01), Tuttle
patent: 5467013 (1995-11-01), Williams et al.
patent: 5808415 (1998-09-01), Hopkins
patent: 5834931 (1998-11-01), Moore et al.
patent: 5867020 (1999-02-01), Moore et al.
Brady III Wade James
Metjahic Safet
Nguyen Vincent Q.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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