Probe for measuring characteristics of an excitation current...

Details Probe for measuring characteristics of an excitation current... Probe for measuring characteristics of an excitation current...

2005-09-15

2009-11-10

He, Amy (Department: 2831)

Electricity: measuring and testing

Testing potential in specific environment

Voltage probe

C324S149000

Reexamination Certificate

active

07615985

ABSTRACT:
A probe for measuring electrical characteristics of an excitation current of a plasma is provided. The probe is mounted on a conductive line that includes an inner conductor and an outer conductor. The probe includes a current sensor and a voltage sensor. The current sensor includes a groove formed in the ground of one of the conductors in order to form a detour for the current flowing through the conductor, and a point for measuring electric voltage between a ground connected to the conductor and a point of the groove. The current sensor thus is able to measure a voltage proportional to the first time derivative of intensity (Iplasma) of the excitation current. The voltage sensor is a shunt sensor capable of measuring a voltage proportional to the first time derivative of the voltage (Vplasma) of the excitation current. A plasma reactor including a probe of the aforementioned type is also provided.

REFERENCES:
patent: 5808415 (1998-09-01), Hopkins
patent: 5834931 (1998-11-01), Moore et al.
patent: 6239587 (2001-05-01), Buck
patent: 6449568 (2002-09-01), Gerrish
patent: 6501285 (2002-12-01), Hopkins et al.
patent: 7154256 (2006-12-01), Parsons et al.
patent: 02/054091 (2002-07-01), None

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