Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1979-08-24
1981-08-04
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, G01R 3126
Patent
active
042824834
ABSTRACT:
A probe for determining the p or n-type of semiconductor material wherein a conductive wire is positioned for point contact with the semiconductor, forming a diode. The wire is energized by r.f. current passing through a capacitor so that the current is rectified at the diode, charging the capacitor. A voltage comparator is connected to the capacitor for determining the polarity of charge on the capacitor and hence the p or n-type of the semiconductor wafer. The semiconductor is supported on a non-diffusing dielectric over a conductive carrier such that r.f. current passes through the dielectric to the carrier, thereby completing the circuit.
REFERENCES:
1968 Book of ASTM Standards; ASTM Designation: F42-68T; 1968; pp. 536-541.
Poponiak, et al., "Detecting Conductivity-Type . . . ", IBM Tech. Dis. Bull., vol. 14, No. 1, Jun. 1971, p. 100.
Kren George J.
Urbanek Karel
Wheeler William R.
Karlsen Ernest F.
Schneck Thomas
Tencor Instruments
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