Probe for detecting gaseous polar molecules such as water vapor

Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting

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200 6106, H01L 700

Patent

active

040258920

ABSTRACT:
Probe for selectively detecting polar molecules in a gaseous atmosphere in contact with the probe, characterized by a layer of semiconductor material covered by a film of dielectric material.

REFERENCES:
patent: 3242007 (1966-03-01), Jensen
patent: 3864659 (1975-02-01), Furuuchi et al.

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