Probe for atomic force microscope usable for scanning tunneling

Details Probe for atomic force microscope usable for scanning tunneling Probe for atomic force microscope usable for scanning tunneling

1992-08-25

1994-10-11

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

H01J 3726

Patent

active

053536320

ABSTRACT:
According to the invention, a probe for an atomic force microscope comprising a means for tunneling current is disclosed. The probe has a metal tip which is covered with a monomolecular film. The body of the probe is covered with a monomolecular laminated film, wherein conductive molecules are fixed on the the monomolecular film and/or the said monomolecular laminated film. The monomolecular laminated film has a crosslinked electroconductive surface. The monomolecular laminated film is fixed on the metal by a covalent bond comprising a siloxane base (--SiO--), and the laminated part of the molecule is also chemically fixed on the metal surface of a covalent bond comprising a siloxane base (--SiO--). The probe of this invention is durable and can be put to practical use, because the films are surface conductive rather than conductive through its thickness. Moreover, compared with a conventional probe, since this probe does not metal deposited on the surface, it has high reproductibility with less process step to manufacture the probe.

REFERENCES:
patent: 5108573 (1992-04-01), Rubinstein et al.
patent: 5138159 (1992-08-01), Takase et al.
M. Pitsch et al., "Atomic Resolution with a New Atomic Force Tip*", vol. 175, No. 1, pp. 81-84 (Aug. 1989).
Patent Abstract of Japan, Publication No. JP2203260.
Patent Abstract of Japan, Publication No. JP62221103.
European Patent Search Report.

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