Probe device having micro-strip line structure

Details Probe device having micro-strip line structure Probe device having micro-strip line structure

1989-07-13

1991-03-05

Wieder, Kenneth

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158P, G01R 102, G01R 104

Patent

active

049980629

ABSTRACT:
A probe device for measuring the electric characteristics of an IC chip on a wafer, etc. is disclosed. The probe device includes a unit having a micro-strip line structure in which a plurality of probes are integrally formed. The unit comprises a flexible insulating quartz base plate, a plurality of mutually insulated lead strips provided on one surface of the base plate, and a ground strip provided on the other surface of the base plate. Notches are formed in those regions of the insulating base plate, which are located between the lead strips at an end portion of the unit. The unit is supported such that the tip end portion of the unit is formed as a free-end portion and the unit is inclined by a predetermined angle toward electrode pads on the IC chip with respect to an imaginary horizontal plane. The combination of each of the lead strip, the insulating quartz base plate an the ground strip constitute a micro-strip line. At the tip end portion of the unit, each micro-strip line serves as the probe. A tip portion of each lead strip serves as a contact of the probe.

REFERENCES:
patent: 3984620 (1976-10-01), Robillard et al.
patent: 4055805 (1977-10-01), Ardezzone
patent: 4593243 (1986-06-01), Lao et al.
patent: 4697143 (1987-09-01), Lockwood et al.
patent: 4727319 (1988-02-01), Shahriary
patent: 4740746 (1988-04-01), Pollock et al.
patent: 4764723 (1988-08-01), Strid
patent: 4827211 (1989-05-01), Strid et al.
patent: 4853627 (1989-08-01), Gleason et al.

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