Probe device

Details Probe device Probe device

2007-11-20

2010-02-23

Karlsen, Ernest F (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754090

Reexamination Certificate

active

07667474

ABSTRACT:
A probe device includes a stage for fixing a semiconductor device having an external connection pad; a heating unit provided in the stage, for heating the semiconductor device to a predetermined temperature; and a probe card having a probe pin and a support substrate for supporting the probe pin, in which a resistance heating element is provided to the support substrate so as to heat a portion of the support substrate corresponding to a disposition portion of the probe pin to a temperature substantially equal to the predetermined temperature.

REFERENCES:
patent: 4839587 (1989-06-01), Flatley et al.
patent: 5006796 (1991-04-01), Burton et al.
patent: 5124639 (1992-06-01), Carlin et al.
patent: 5489851 (1996-02-01), Heumann et al.
patent: 6181145 (2001-01-01), Tomita et al.
patent: 6690185 (2004-02-01), Khandros et al.
patent: 7002363 (2006-02-01), Mathieu
patent: 7071714 (2006-07-01), Eldridge et al.
patent: 7091733 (2006-08-01), Takekoshi et al.
patent: 7495458 (2009-02-01), McClanahan et al.
patent: 2000-138268 (2000-05-01), None

Affiliated with

Also associated with

Rating

Probe device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probe device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4170205