Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-12-21
1991-10-29
Wieder, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 725, 324158P, G01R 102, G01R 104
Patent
active
050618946
ABSTRACT:
A probe device for measuring the electric characteristics of an IC chip on a wafer, etc. is disclosed. The probe device includes a unit having a micro-strip line structure in which a plurality of probes are integrally formed. The unit comprises a flexible insulating quartz base plate, a plurality of mutually insulated lead strips provided on one surface of the base plate, and a ground strip provided on the other surface of the base plate. Notches are formed in those regions of the insulating base plate, which are located between the lead strips at an end portion of the unit. The unit is supported such that the tip end portion of the unit is formed as a free-end portion and the unit is inclined by a predetermined angle toward electrode pads on the IC chip with respect to an imaginary horizontal plane. The combination of each of the lead strip, the insulating quartz base plate and the ground strip constitute a micro-strip line. At the tip end portion of the unit, each micro-strip line serves as the probe. A tip portion of each lead strip serves as a contact of the probe.
REFERENCES:
patent: 4593243 (1986-06-01), Lao et al.
patent: 4740746 (1988-04-01), Pollock et al.
patent: 4764723 (1988-08-01), Strid
patent: 4827211 (1989-05-01), Strid et al.
Burns William J.
Tokyo Electron Limited
Wieder Kenneth A.
LandOfFree
Probe device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Probe device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1402250