Probe device

Details Probe device Probe device

1996-06-28

1997-06-24

Boudreau, Leo

Image analysis

Applications

Manufacturing or product inspection

382151, 382286, G06K 900

Patent

active

056424329

ABSTRACT:
A device for examining the electrode pads of a semiconductor chip comprises a table for supporting a semiconductor wafer including chips each having two lines being substantially straight and consisting of a plurality of electrode pads, a probe card having two lines corresponding to the lines of the electrode pads, and consisting of a plurality of probes, first and second TV cameras for photographing the lines of the electrode pads and probes, and a control unit responsive to signals supplied from the cameras, for calculating first imaginary lines corresponding to the lines of the electrode pads and second imaginary lines corresponding to the lines of the probes, and for recognizing deviation between the first and second imaginary lines. The table is moved by the deviation so as to align the lines of the pads with those of the probes.

REFERENCES:
patent: 4786867 (1988-11-01), Yamatsu
patent: 4929893 (1990-05-01), Sato et al.

Affiliated with

Also associated with

Rating

Probe device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probe device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-154283