Probe construction using a recess

Details Probe construction using a recess Probe construction using a recess

2005-03-01

2005-03-01

Chang, Richard (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S426100, C029S882000, C029S846000, C029S876000

Reexamination Certificate

active

06860009

ABSTRACT:
A method of constructing a probe which includes providing a substrate and creating a first substantially asymmetrical recess within the substrate. A conductive material is located within the recess and a conductive trace is electrically connected with the conductive material. A membrane supports the conductive trace, wherein the conductive material is located between the membrane and the substrate. The substrate is removed from the conductive material.

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Electronic Engineers' Handbook, McGraw-Hill Book Company, First Edition; 8 pages, ©1975.
Kim, Yong-Dae, et al.: Fabrication of a Silicon Micro-Probe for Vertical Probe Card Application, In: Japan J. Appl. Phys., vol. 37, 1998, S. 7070-7073.

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