Probe cleaning tool, probe cleaning method and semiconductor waf

Details Probe cleaning tool, probe cleaning method and semiconductor waf Probe cleaning tool, probe cleaning method and semiconductor waf

1998-03-13

2000-05-02

Rose, Robert A.

Abrading

Abrading process

Utilizing nonrigid tool

451533, B24B 1900, B24D 1504

Patent

active

060566272

ABSTRACT:
A probe cleaning tool including an abrading member for scraping foreign material adhering to an end portion of a probe, made of a mixture of an elastic base material and abrasive particles, and a dust removing film attached to a surface of the abrading member. The dust removing film removes foreign material adhering to the end portion of the probe when the end portion is stuck into and extracted from the probe cleaning tool. The foreign material scraped off the end portion of the probe are confined in the probe cleaning tool and the end portion of the probe can be completely cleaned.

REFERENCES:
patent: 1652875 (1927-12-01), Rein
patent: 4361926 (1982-12-01), Brush et al.
patent: 4547923 (1985-10-01), DeVries et al.
patent: 4590422 (1986-05-01), Milligan
patent: 5016401 (1991-05-01), Mangus

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