Probe card with tunable stage and at least one replaceable...

Details Probe card with tunable stage and at least one replaceable... Probe card with tunable stage and at least one replaceable...

2007-08-07

2007-08-07

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

10906076

ABSTRACT:
The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.

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patent: 7023225 (2006-04-01), Blackwood

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