Probe card system and method

Details Probe card system and method Probe card system and method

1995-03-09

1996-04-09

Nguyen, Vinh P.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324754, G01R 3102

Patent

active

055064981

ABSTRACT:
A semiconductor wafer probe test interface system (2) and method of operating the system. The wafer probe system includes a plurality of cassettes (302) adapted to hold wafer probe test cards (304). The cassettes are loaded into position for testing of semiconductor wafers with a transport assembly system (6). A memory device (316) on the cassette is used to store data regarding usage of the card such as number of wafer touchdowns. A smart controller (220) has the capability to "talk" to the prober and tester.

REFERENCES:
patent: 4105970 (1978-08-01), Katz
patent: 4746855 (1988-05-01), Wrinn
patent: 4755747 (1988-07-01), Sato
patent: 4935696 (1990-06-01), DiPerna
patent: 5019771 (1991-05-01), Yang et al.
patent: 5030907 (1991-07-01), Yih et al.

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