Probe card locking device of a semiconductor wafer probe station

Details Probe card locking device of a semiconductor wafer probe station Probe card locking device of a semiconductor wafer probe station

1996-03-29

1997-07-01

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3102

Patent

active

056442467

ABSTRACT:
A probe card locking device of a semiconductor wafer probe station for locking a probe card by using a tensile force of springs solves an unbalance issue in a locking operation, facilitates the operation via an automation and shortens setup time. A pair of frames are respectively formed with support steps for supporting both sides of a probe card and installed in a tester head in parallel with each other to be spaced apart by a prescribed distance. A pair of locking members have pressing steps for pressing both sides of the probe card from above supported by the support steps of the frames. Plural springs are installed between the locking members and frames for elastically supporting the locking members for allowing a close attachment to the frames with a prescribed force for locking the probe card. A pair of driving cams respectively attached to outer planes of the locking members are provided with slanted driving planes driven to ascend and descend the locking members by means of bearings on pistons of a pair of air cylinders, which slidably reciprocate while being in contact with the slanted driving planes of the driving cams.

REFERENCES:
patent: 4321122 (1982-03-01), Whitcomb et al.
patent: 5325052 (1994-06-01), Yamashita
patent: 5489853 (1996-02-01), Nakajima
patent: 5521522 (1996-05-01), Abe et al.
patent: 5559446 (1996-09-01), Sano

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