Probe card locking device of a probe station for testing a semic

Details Probe card locking device of a probe station for testing a semic Probe card locking device of a probe station for testing a semic

1996-03-29

1997-10-07

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3102

Patent

active

056752610

ABSTRACT:
A probe card locking device for a probe station performs a characteristics test or the like by contacting probes to respective dies of a wafer subjected to a predetermined unit process in a semiconductor analysis system. A pair of cylinders operated by air supplied to the probe system upwardly and downwardly operate support members respectively connected to the cylinders to lock probe cards to frames. Thus, the damage upon the probe card and inferior wafer resulting from the possible drop of the pressing bolt is prevented to enhance stability when operating the system.

REFERENCES:
patent: 5124646 (1992-06-01), Shiraishi
patent: 5471148 (1995-11-01), Sinsheimer et al.
patent: 5489853 (1996-02-01), Nakajima
patent: 5521522 (1996-05-01), Abe et al.
patent: 5568056 (1996-10-01), Ishimoto

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