Probe card inclination adjusting method, inclination...

Details Probe card inclination adjusting method, inclination... Probe card inclination adjusting method, inclination...

2009-02-27

2011-10-04

Nguyen, Vinh (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754010, C324S754110

Reexamination Certificate

active

08030955

ABSTRACT:
An inclination adjusting method adjusts an inclination of a probe card installed at a probe apparatus to make the probe card be in parallel with a mounting surface of a movable mounting table for mounting thereon an object to be inspected. The method includes: detecting an average tip height of multiple probes disposed at each of plural locations of the probe card by using a tip position detecting device; obtaining an inclination of the probe card with respect to the mounting table based on differences in the average tip heights detected from the plural locations of the probe card; and adjusting the inclination of the probe card based on the obtained inclination.

REFERENCES:
patent: 5644245 (1997-07-01), Saitoh et al.
patent: 7772862 (2010-08-01), Yamada et al.
patent: 7839156 (2010-11-01), Yamada et al.
patent: 7-231018 (1995-08-01), None
patent: 2005-140662 (2005-06-01), None
patent: 2007-0029572 (2007-03-01), None
patent: 02009164298 (2009-07-01), None
Office Action issued Dec. 20, 2010 in Korean Patent Application No. 10-2009-0016483 (with English translation).

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