Probe card having separated upper and lower probe needle groups

Details Probe card having separated upper and lower probe needle groups Probe card having separated upper and lower probe needle groups

1997-05-14

1999-07-20

Brown, Glenn W.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, 324761, G01R 1073, G01R 3126

Patent

active

059260289

ABSTRACT:
A probe card comprises a base having a frame portion to define an opening portion therein and having a lower surface, and first and second resin fixing portions mounted on the lower surface of the frame portion and remote from each other to define a channel therebetween. The first resin fixing portion supports upper- and lower-level probe needle groups such that their intermediate portions are electrically insulated from each other, that distal end portions of the upper-level probe group are exposed to the opening portion of the base, and that distal end portions of the lower-level probe needle group are exposed to the channel. The second resin fixing portion supports intermediate portions of the upper-level probe needle group to be electrically insulated from each other. Needle point groups of the respective probe needle groups are brought into contact with electrodes of a plurality of rows.times.a plurality of columns of semiconductor elements on an inspection target body simultaneously, thereby performing inspection of electrical characteristics of the plurality of semiconductor elements simultaneously.

REFERENCES:
patent: 4523144 (1985-06-01), Okubo et al.
patent: 4567433 (1986-01-01), Ohkubo et al.
patent: 4623839 (1986-11-01), Garretson et al.
patent: 5055778 (1991-10-01), Okubo et al.

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