Probe card having groups of probe needles in a probing test appa

Details Probe card having groups of probe needles in a probing test appa Probe card having groups of probe needles in a probing test appa

1996-09-23

1998-10-06

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3102, G01R 1073

Patent

active

058182497

ABSTRACT:
A probe card which can help to enhance the productivity of semiconductor integrated circuits manufacturing and to reduce the manufacturing cost thereof, and a method of probe-testing semiconductor integrated circuits by using the probe card. The probe card is designed to test semiconductor integrated circuits formed on a semiconductor wafer and arranged in rows and columns. It has groups of probe needles provided to contact semiconductor integrated circuits arranged in two columns and at least two rows. The card receives a test signal from a test device and supplies the test signal simultaneously to these semiconductor integrated circuits arranged in two columns and at least tow rows, through the groups of probe needles. It receives response signals simultaneously from the semiconductor integrated circuits through the groups of probe needles and then supplies the response signals to the tester.

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patent: 5525912 (1996-06-01), Momohara
patent: 5623214 (1997-04-01), Pasiecznik, Jr.
patent: 5642054 (1997-06-01), Pasiecznik, Jr.

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