Probe card having deeply recessed trench and method for...

Details Probe card having deeply recessed trench and method for... Probe card having deeply recessed trench and method for...

2007-10-23

2007-10-23

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

11281365

ABSTRACT:
The present invention relates to a probe card that a probe of the probe card is movable only in a vertical direction using a trench to improve a electrical or a mechanical characteristic and to automatically limit the vertical movement thereof within a predetermined range. A pitch may be reduced so as to correspond to a decreasing distance between pads. A flatness of a probe tip may be maintained within a few micrometers using a semiconductor manufacturing process. 32 simultaneous parallel testing is possible contrary to a convention probe card. A wafer level testing is possible, and time and cost for a wafer testing are reduced.

REFERENCES:
patent: 6087840 (2000-07-01), Mizuta
patent: 6114864 (2000-09-01), Soejima et al.
patent: 6452407 (2002-09-01), Khoury et al.
patent: 6724204 (2004-04-01), Cho et al.
patent: 6922069 (2005-07-01), Jun

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