Probe card for electrical testing a chip in a wide...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Details

C324S760020, C324S762010

Reexamination Certificate

active

06906543

ABSTRACT:
This disclosure provides a probe card for electrical testing a chip in a wide temperature range. The probe card includes a circuit board, a cover, a circular supporter positioned on the circuit board, at least a probe needle fixed on the circular supporter by an adhesive, and a flow line positioned in the space between the circuit board and the cover. Embodiments of the invention moderates the temperature of the probe card by introducing a fluid such as, for example, forced-air or nitrogen into the flow line to carry heat into or out of the probe card.

REFERENCES:
patent: 4777716 (1988-10-01), Folk et al.
patent: 5124639 (1992-06-01), Carlin et al.
patent: 5550482 (1996-08-01), Sano
patent: 6037785 (2000-03-01), Higgins
patent: 6194907 (2001-02-01), Kanao et al.
patent: 6373271 (2002-04-01), Miller et al.
patent: 2001281267 (2001-10-01), None

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