Probe card cooling assembly with direct cooling of active...

Details Probe card cooling assembly with direct cooling of active... Probe card cooling assembly with direct cooling of active...

2005-05-10

2005-05-10

Zarneke, David (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

06891385

ABSTRACT:
A probe card cooling assembly for use in a test system includes a package with one or more dies cooled by direct cooling. The cooled package includes one or more dies with active electronic components and at least one coolant port that allows a coolant to enter the high-density package and directly cool the active electronic components of the dies during a testing operation.

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