Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-07-04
2006-07-04
Nguyen, Vinh (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S758010, C324S761010, C361S760000, C439S066000
Reexamination Certificate
active
07071715
ABSTRACT:
A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface tile provided between the probes and a lower flexural strength space transformer substrate.
REFERENCES:
patent: 6483328 (2002-11-01), Eldridge et al.
patent: 6509751 (2003-01-01), Mathieu et al.
patent: 6690185 (2004-02-01), Khandros et al.
patent: 2004/0239350 (2004-12-01), Nagar et al.
U.S. Appl. No. 09/527,931, filed Mar. 17, 2000, Mathieu et al.
Cooper Timothy E.
Eldridge Benjamin N.
Larder Richard A.
Shenoy Ravindra V.
Shinde Makarand S.
Chan Emily Y
FormFactor Inc.
Nguyen Vinh
Ward Thomas A.
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