Probe card cleaning apparatus, probe apparatus with the cleaning

Details Probe card cleaning apparatus, probe apparatus with the cleaning Probe card cleaning apparatus, probe apparatus with the cleaning

1995-12-05

1998-07-14

Moore, Chris K.

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

15379, 15404, B08B 310

Patent

active

057784850

ABSTRACT:
A cleaning apparatus for cleaning a probe card having a contact element to be brought into electrical contact with a pad of a circuit to be inspected, comprises a conductive brush to be brought into contact at least with the contact element to clean the probe card, and a gas blow mechanism for intermittently blowing gas to the brush. The conductive brush is vibrated by the gas blow, and a particle adhered from the probe card is removed by the vibrating brush and the gas jet.

REFERENCES:
patent: 2637873 (1953-05-01), Berezny
patent: 3897605 (1975-08-01), Dickinson
patent: 5329665 (1994-07-01), Thayer et al.
patent: 5377381 (1995-01-01), Wilson
patent: 5438729 (1995-08-01), Powell

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