Probe card changer system and method

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324754, G01R 3102

Patent

active

061078131

ABSTRACT:
A prober tester interface system and a method for loading a probe card into a prober. The interface system includes a stiffener for holding a probe card, the stiffener having an upper surface, a perimeter, an underside, a plurality of recesses in the underside around the perimeter, and first and second alignment holes. A theta ring for holds the stiffener in the prober, the theta ring having first alignment pins for engaging the first alignment holes, a plurality of lock cylinders for engaging the recesses, and a machined lip against which the upper surface of the stiffener is forced by the lock cylinders. A loader is coupled to the prober for loading the stiffener in and unloading the stiffener from the theta ring, the loader having second alignment pins for engaging the second alignment holes. A theta drive assembly is coupled to the theta ring for rotating the theta ring to align the probe card with the test head. In a specific embodiment, the test head includes a contactor, and the theta ring includes a plurality of clamp cylinders for locking the contactor in theta and Z while a probe card is being loaded or unloaded.

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Sales brochure entitled "BE6000 Series Base Entry Probe Interface System," Fresh Technology Group, undated.
Sales brochure entitled DS1994 Touch Time and Memory, Dallas Semiconductor, undated.
Advertising brochure entitled "Automation and Cleanliness--Advanced TEL Technology Leads the Way to New Levels," TEL, undated.
Page from DS9092K User's Manual, (Aug. 1991).

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