Probe card capable of multi-probing

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Details

C324S761010

Reexamination Certificate

active

07659735

ABSTRACT:
A probe card capable of multi-probing includes a print circuit board having a plurality of contact portions and a test module having a plurality of test boards. Each of the test boards includes at least one probing portion on which a plurality of needles are arrayed. The test module selects one of the test boards and probes semiconductor chips formed on a semiconductor wafer through the needles arrayed on the probing portion of the selected test board.

REFERENCES:
patent: 4956602 (1990-09-01), Parrish
patent: 5070297 (1991-12-01), Kwon et al.
patent: 5124660 (1992-06-01), Cilingiroglu
patent: 5555422 (1996-09-01), Nakano
patent: 6407566 (2002-06-01), Brunelle et al.
patent: 6456099 (2002-09-01), Eldridge et al.
patent: 6690185 (2004-02-01), Khandros et al.
patent: 2001-183392 (2001-07-01), None
patent: 1998-021866 (1998-07-01), None
patent: 2000-0008954 (2000-05-01), None

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