Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1997-12-22
2000-05-09
Do, Diep N.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324758, 3241581, G01R 3102
Patent
active
060608927
ABSTRACT:
A probe card attaching mechanism fits a probe card to a prober that checks electric characteristics of an object to be tested (e.g., an integrated circuit formed on a semiconductor wafer). The probe card has measurement contactors which are to be brought into contact with the electrodes of the object. The probe card attaching mechanism is provided with a fixing ring, a ring-like card holder, and a lock ring. The fixing ring is secured at an opening section that is on top of the casing of the prober. The fixing ring has a reference surface on the lower side thereof. The card holder is adapted to hold the probe card. The card holder has a reference surface on the upper side and a number of driven portions of cam mechanisms on the outer circumference. The lock ring is provided on the lower side of the fixing ring and is rotatable in both a normal direction and a reverse direction. The lock ring has driving portions of the cam mechanisms, and the driving portions cooperate with the driven portions of the card holder. In accordance with the rotation of the lock ring, its driving portions raise the driven portions of the card holder. Accordingly, the reference surface of the card holder is pressed tightly against the reference surface of the fixing ring, and the card holder is made immovable thereby.
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Do Diep N.
Sundaram T. R.
Tokyo Electron Limited
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