Probe card assembly with dielectric structure

Details Probe card assembly with dielectric structure Probe card assembly with dielectric structure

2007-10-09

2007-10-09

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

11121241

ABSTRACT:
A probe card assembly for providing electrical interconnection between a semiconductor device to be tested and a test system is provided. The probe card assembly includes a plurality of probes supported by a support substrate, each of the plurality of probes including an end portion extending away from the support substrate. The end portion is configured to be electrically connected to a semiconductor device to be tested. The probe card assembly also includes a dielectric sheet positioned between the support substrate and the end portion of the plurality of probes such that the probes extend through apertures defined by the dielectric sheet.

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International Searching Authority, “Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration,” PCT/US2006/017097, dated Sep. 25, 2006, 5 pages.
Current Claims, PCT/US2006/017097, 4 pages.

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