Probe card assembly and method of manufacturing probe card assem

Details Probe card assembly and method of manufacturing probe card assem Probe card assembly and method of manufacturing probe card assem

1993-12-14

1996-05-28

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, G01R 3102

Patent

active

055215238

ABSTRACT:
A probe card assembly thermal influenced from a wafer with which a probe makes contact during a probe test. The assembly includes a probe card unit having a great number of probes to be brought into contact with the wafer to be tested, and a holder for holding the probe card unit at a center portion thereof. The holder includes a ring member, supported by another member, for supporting the probe card unit from a low side, and a cutout stepped member and a slot hole for relaxing stress due to thermal expansion concentrated on the ring member.

REFERENCES:
patent: 3963985 (1976-06-01), Geldermans
patent: 5077523 (1991-12-01), Blanz
patent: 5124639 (1992-06-01), Carlin
patent: 5198753 (1993-03-01), Hamburgen

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