Probe card assembly

Details Probe card assembly Probe card assembly

2008-04-29

2008-04-29

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754090

Reexamination Certificate

active

11317408

ABSTRACT:
A probe card assembly has a probe contractor substrate having a plurality of probe contractor tips thereon and a probe card wiring board with an interposer disposed between the two. Support posts contacting the probe contractor substrate are vertically adjustable until secured by a locking mechanism which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contractor substrates is substantially parallel to a predetermined reference plane.

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patent: 6784678 (2004-08-01), Pietzschmann
patent: 7074072 (2006-07-01), Huebner
patent: 7075319 (2006-07-01), Mori
patent: 0567332 (1993-10-01), None
patent: WO 2004/056698 (2004-07-01), None
Jun-Bo Yoon et al.; “Monolithic Integration of 3-D Electroplated Microstructures With Unlimited Number of Levels using Planarization With A Scarificial Metallic Mold (PSMM)”, Twelfth IEEE International Conference on Micro Electro Mechanical Systems; 1999 MEMS; Jan. 17-21, 1999; pp. 624-629.

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