Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1990-11-20
1992-06-23
Nguyen, Vinh
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158F, 439482, G01R 1512, G01R 3100
Patent
active
051246392
ABSTRACT:
A probe card apparatus is used to functionally test an integrated circuit wafer at elevated temperatures. In one form, a probe card having a cavity between first and second opposite sides is provided. Within the probe card cavity is a probe card ring which is used to support and position a plurality of probe leads. The plurality of probe leads are attached to the first side of the probe card and extend toward the cavity and are used to make electrical contact with an integrated circuit wafer. Radiant heat is provided in close proximity to the probe card ring for heating the plurality of probe leads to a predetermined temperature and for sustaining the predetermined temperature to accurately keep each probe lead at a predetermined location within the cavity.
REFERENCES:
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3963985 (1976-06-01), Geldermans
patent: 4172993 (1979-10-01), Leach
patent: 4839587 (1989-06-01), Flatley et al.
patent: 4870355 (1989-09-01), Kufis et al.
patent: 4931726 (1990-06-01), Kasukabe et al.
patent: 4962355 (1990-10-01), Holderfield et al.
Carlin Scott J.
Roberts, Jr. Samuel
King Robert L.
Motorola Inc.
Nguyen Vinh
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