Probe card and wafer testing method using the same

Details Probe card and wafer testing method using the same Probe card and wafer testing method using the same

1998-03-10

2000-08-08

Metjahic, Safet

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324760, 324761, G01R 3102

Patent

active

061007080

ABSTRACT:
A probe needle has one end and the other end. Probe needle has its one end fixed to the bottom surface of a substrate, and extending at a prescribed angle to substrate. A portion of probe needle positioned between the one end and the other end is pressed by a rod attacked between a pair of pillow toward substrate. Thus, an improved probe card which permits appropriate pressure needle to be provided even if the variation in the height of probe needles is large.

REFERENCES:
patent: 3613001 (1971-10-01), Hostetter
patent: 4599559 (1986-07-01), Evans
patent: 5055778 (1991-10-01), Okubo et al.
patent: 5670889 (1997-09-01), Okubo et al.
patent: 5691651 (1997-11-01), Ehlermann

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