Probe card, and testing apparatus having the same

Details Probe card, and testing apparatus having the same Probe card, and testing apparatus having the same

2005-04-26

2005-04-26

Zarneke, David (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

06885204

ABSTRACT:
Multiple probe needles are arranged to be brought into contact with one electrode pad with a probe card, the multiple probe needles are connected in parallel with the same potential, and configured so that the amount of current flowing through the probe needles is at least halved, thereby decreasing generation of heat from Joule heat, and preventing melting of aluminum of which the electrode pads are composed. Consequently, a probe card can be provided wherein adhesion of molten material to the probe needles is suppressed, and wherein increased contact resistance due to oxidization of the material which has melted and adhered is prevented.

REFERENCES:
patent: 6075376 (2000-06-01), Schwindt
patent: 6559668 (2003-05-01), Tervo
patent: 6606235 (2003-08-01), Chua et al.
patent: 06-018560 (1994-01-01), None
patent: 11-148947 (1999-06-01), None
U.S. Appl. No. 09/810,247, filed Mar. 19, 2001, Megumi Takemoto, et al.

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