Probe card and method for manufacturing probe card

Details Probe card and method for manufacturing probe card Probe card and method for manufacturing probe card

2007-02-20

2007-02-20

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S761010

Reexamination Certificate

active

10395208

ABSTRACT:
A probe card that is manufactured inexpensively. The probe card includes a base plate, a flexible substrate, and a contact probe. The contact probe is a flexible substrate formed from polyimide resin. The contact probe has a plurality of parallel wires. Each wire has a distal end that functions as a contact. The contact probe is produced by cutting a general purpose substrate having a plurality of parallel wires formed at a predetermined pitch. The number of the parallel wires is equal to the number of pads of an LSI chip.

REFERENCES:
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patent: 6305230 (2001-10-01), Kasukabe et al.
patent: 6617863 (2003-09-01), Kasukabe et al.
patent: 6734691 (2004-05-01), Saijyo et al.

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