Probe card

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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07888953

ABSTRACT:
A probe card is disclosed that includes a board having a first surface and a second surface facing away from each other and a through hole formed between the first and second surfaces; and a probe needle having a penetration part and a support part. The penetration part is placed in the through hole without contacting the board and projects from the first and second surfaces of the board. The support part is integrated with a first one of the end portions of the penetration part and connected to one of the first and second surfaces of the board. The support part has a spring characteristic. The penetration part is configured to have a second one of its end portions come into contact with an electrode pad of a semiconductor chip at the time of conducting an electrical test on the semiconductor chip.

REFERENCES:
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patent: 7219418 (2007-05-01), Byrd
patent: 7368927 (2008-05-01), Smith et al.
patent: 7429497 (2008-09-01), Stone
patent: 7432728 (2008-10-01), Kilicaslan et al.
patent: 7498827 (2009-03-01), Mochizuki et al.
patent: 7595651 (2009-09-01), Ku et al.
patent: 7750651 (2010-07-01), Chao et al.
patent: 2006/0261828 (2006-11-01), Cram et al.
patent: 2006-049498 (2006-02-01), None

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