Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2007-09-11
2007-09-11
Liu, Shuwang (Department: 2809)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S756010, C324S757020
Reexamination Certificate
active
11224304
ABSTRACT:
The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probes100aand100b; a guide substrate200in which a plurality of guide holes210are formed through which the first and second probes100aand100bare inserted in a freely movable manner; a support member400provided above the guide substrate200; a first sheet member300aof flexibility, attached to the support member400, having a first electrode pad310aon its surface, in which a tail end120aof the first probe100aprojecting out from the guide hole210is brought into contact with the first electrode pad310a; a second sheet member300bof flexibility, attached to the support member400, having a second electrode pad310bon its surface, in which a tail end120bof the second probe100bprojecting out from the guide hole210and penetrating through the first sheet member300ais brought into contact with the second electrode pad310b; and vibrating means500attached to the support member400, wherein the vibrating means500vibrates the first and second probes100aand100bvia the support member400and the first and second sheet members300aand300b.
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Kimura Teppei
Machida Kazumichi
Urata Atsuo
Kratz Quintos & Hanson, LLP
Liu Shuwang
Nihon Denshizairyo Kabushiki Kaisha
Von Benken Christopher J
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