Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1994-07-26
1995-05-02
Nguyen, Vinh
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
G01R 106
Patent
active
054123291
ABSTRACT:
A probe card used in a probing test machine which send and receive test signals into circuits through pads of a semiconductor chip, thereby examining the electrical characteristics of the circuits. The probe card comprises a supporting plate, a flexible printed circuit base including a flexible film base material supported by the supporting plate, circuits printed on the film base material being connected electrically to a tester, contactors connected electrically to the printed circuits and adapted to be brought into contact with the pads in equally corresponding relation, and a cushioning medium designed so as to back up a section in which the contactors are mounted. When the contactors are brought into contact with the pads, individually, the cushioning medium undergoes an elastic deformation, so that the contact between the contactors and the pads is improved.
REFERENCES:
patent: 4906920 (1990-03-01), Huff et al.
patent: 5134365 (1992-07-01), Okubo et al.
patent: 5180977 (1993-01-01), Huff
Iino Shinji
Kubota Tamio
Yokota Keiichi
Nguyen Vinh
Tokyo Electron Yamanashi Limited
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