Coating processes – Nonuniform coating – Applying superposed diverse coatings or coating a coated base
Reexamination Certificate
2008-04-09
2008-11-18
Parker, Frederick J (Department: 1792)
Coating processes
Nonuniform coating
Applying superposed diverse coatings or coating a coated base
C427S097300
Reexamination Certificate
active
07452570
ABSTRACT:
Probe-based lithography, including: depositing a preceramic polymer on a substrate; writing nanoscale features in the polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into hardened, ceramic material, the chemical reaction activated with a prescribed activation energy supplied by heat and/or pressure applied by a probe tip; then depositing new layers and continuing according to a desired three-dimensional pattern; either by (a) removing unactivated preceramic polymer utilizing a removal solvent, or (b) cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure mechanically and/or electrically; and where the ceramic pattern is made electrically conductive by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the write step in a chemically-active environment that supplies dopant atoms during the chemical reaction.
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Bhaskaran Harish
Cannara Rachel
Duerig Urs T.
Gotsmann Bernd W.
Knoll Armin W.
Carpenter Robert K.
Carpenter & Assoc.
International Business Machines - Corporation
Parker Frederick J
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