Probe assembly for testing

Details Probe assembly for testing Probe assembly for testing

1998-11-25

2000-07-04

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324762, G01R 102

Patent

active

060844205

ABSTRACT:
An apparatus for probing a semiconductor wafer includes one or more probe tips, the position of each being self-adjustable according to the pressure and direction of the pressure applied to it. In the present invention, elastic probe assemblies (which include the probe tips) independently move to compensate when the wafer expands in size due to thermal expansion and/or changes of probing pressure.

REFERENCES:
patent: 5172050 (1992-12-01), Swapp
patent: 5666063 (1997-09-01), Abercrombie et al.
patent: 5763879 (1998-06-01), Zimmer et al.
patent: 5859539 (1999-01-01), Wood et al.
patent: 5909123 (1999-06-01), Budnaitis

Affiliated with

Also associated with

Rating

Probe assembly for testing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probe assembly for testing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe assembly for testing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1489719