Probe apparatus with a swinging holder for an object of examinat

Details Probe apparatus with a swinging holder for an object of examinat Probe apparatus with a swinging holder for an object of examinat

1993-06-17

1995-04-04

Nguyen, Vinh

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 3102

Patent

active

054041112

ABSTRACT:
A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.

REFERENCES:
patent: 4588346 (1986-05-01), Smith
patent: 4705447 (1987-11-01), Smith
patent: 4746857 (1988-05-01), Sakai et al.
patent: 4786867 (1988-11-01), Yamatsu
patent: 4929893 (1990-05-01), Sato et al.
patent: 4943767 (1990-01-01), Yokota
patent: 4965515 (1990-10-01), Karasawa
patent: 4985676 (1991-01-01), Karasawa
patent: 5204617 (1993-04-01), Kumagai

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