Probe apparatus manufacturing method thereof and substrate...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C029S825000, C324S765010

Reexamination Certificate

active

06859053

ABSTRACT:
In a probe apparatus comprising an inspecting device, an intermediate substrate and a probe substrate, in which the inspecting device is electrically connected to a proximal end of the intermediate substrate, and the intermediate substrate has a distal end electrically connected to a proximal end of the probe substrate, and the probe substrate has a distal end electrically connectable to a substrate under inspection, a plurality of probe substrates are electrically connected to the single intermediate substrate. When a particular probe substrate4is damaged, only the particular probe substrate4may be changed, the other probe substrates4continuing to be used, thereby achieving economy.

REFERENCES:
patent: 4161692 (1979-07-01), Tarzwell
patent: 5621333 (1997-04-01), Long et al.
patent: 03-218473 (1991-09-01), None
patent: 08-254677 (1996-10-01), None
patent: 09-054116 (1997-02-01), None
patent: 09-281459 (1997-10-01), None
patent: 10-288627 (1998-10-01), None
International Search Report PCT/JP00/08024 mailed on Feb. 20, 2001.

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