Probe apparatus having probe card exchanging mechanism

Details Probe apparatus having probe card exchanging mechanism Probe apparatus having probe card exchanging mechanism

1995-10-20

1997-06-17

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324758, G01R 3102

Patent

active

056401000

ABSTRACT:
A probe apparatus for examining an electrical characteristic of IC chips formed on a semiconductor wafer has a work table provided in a casing and a probe card provided above the work table. The probe card is detachably attached to an insert ring supported by the casing. A card exchanging mechanism for automatically attaching and detaching the probe card to and from the insert ring is provided. The card exchanging mechanism has a tray for mounting the probe card and transferring the-probe card. The tray is changeable at an initial position outside the casing between a usable state where the tray is horizontally expanded and an unusable state where the tray is vertically folded. An opening/closing cover is provided to cover the tray in the unusable state.

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patent: 4965515 (1990-10-01), Karasawa
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patent: 5254939 (1993-10-01), Anderson et al.
patent: 5315237 (1994-05-01), Iwakura et al.
patent: 5528158 (1996-06-01), Sinsheimer et al.

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