Probe apparatus having burn-in test function

Details Probe apparatus having burn-in test function Probe apparatus having burn-in test function

1995-05-19

1996-10-22

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324756, 324755, 324537, 324754, G01R 3102

Patent

active

055680542

ABSTRACT:
A probe apparatus having a burn-in test function includes an apparatus body, a probe card, having a plurality of probes, for causing the plurality of probes to electrically contact a semiconductor wafer, a tester for measuring the electrical characteristics of the semiconductor wafer, heating and cooling mechanisms for applying a thermal stress to test target chips, as targets of the burn-in test, of the semiconductor wafer, and an electrical mechanism for applying an electrical stress to the chips.

REFERENCES:
patent: 3842346 (1974-10-01), Bobbitt
patent: 4845426 (1989-07-01), Nolan et al.
patent: 5159274 (1992-10-01), Lieux et al.
patent: 5198752 (1993-03-01), Miyata et al.
patent: 5266889 (1993-11-01), Harwood et al.
patent: 5325052 (1994-06-01), Yamashita

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