Probe apparatus for probing an object held above the probe card

Details Probe apparatus for probing an object held above the probe card Probe apparatus for probing an object held above the probe card

1992-08-03

1994-06-14

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 3102

Patent

active

053214536

ABSTRACT:
A probe apparatus having a probe card having plurality of probes, a member arranged above the probe card to hold an object to be probed, and a test head electrically connected to the probes of the probe card.

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