Probe apparatus for measuring an electron state on a sample...

Details Probe apparatus for measuring an electron state on a sample... Probe apparatus for measuring an electron state on a sample...

2006-12-26

2009-02-10

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

C250S306000

Reexamination Certificate

active

07487667

ABSTRACT:
In a probe apparatus that intermittently irradiates a sample with excitation light to observe the sample while subjecting a cantilever including a probe arranged to face a surface of the sample to self-excited vibration at a predetermined frequency, the sample is irradiated with the excitation light at a predetermined timing when a distance between the probe and the sample is not greater than a predetermined distance.

REFERENCES:
patent: 5003815 (1991-04-01), Martin et al.
patent: 5319977 (1994-06-01), Quate et al.
patent: 5627365 (1997-05-01), Chiba et al.
patent: 5960147 (1999-09-01), Muramatsu et al.
patent: 5986256 (1999-11-01), Yagi
patent: 6046448 (2000-04-01), Sato et al.
patent: 6104030 (2000-08-01), Chiba et al.
patent: 6583412 (2003-06-01), Williams
patent: 6834537 (2004-12-01), Niwa et al.
patent: 2003/0015651 (2003-01-01), Kiguchi et al.
patent: 2003/0197120 (2003-10-01), Miyamoto
patent: 7-260808 (1995-10-01), None
patent: 10-260190 (1998-09-01), None
patent: 2000-81382 (2000-03-01), None
patent: 2002-245810 (2002-08-01), None
Martin, Y. et al., “Atomic force microscope-force mapping and profiling on a sub 100-A scale”, J. Appl. Phys 61(10), May 15, 1987, 4723-4729.

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