Probe apparatus for measuring an electron state on a sample...

Details Probe apparatus for measuring an electron state on a sample... Probe apparatus for measuring an electron state on a sample...

2011-01-25

2011-01-25

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C850S001000, C850S006000, C850S033000, C850S052000

Reexamination Certificate

active

07874202

ABSTRACT:
In a probe apparatus that intermittently irradiates a sample with excitation light to observe the sample while subjecting a cantilever including a probe arranged to face a surface of the sample to self-excited vibration at a predetermined frequency, the sample is irradiated with the excitation light at a predetermined timing when a distance between the probe and the sample is not greater than a predetermined distance.

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