Probe apparatus for carrying away dust created by probe testing

Details Probe apparatus for carrying away dust created by probe testing Probe apparatus for carrying away dust created by probe testing

1994-08-23

1995-12-05

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

432241, 165 804, 62126, 414222, F25b 4900, G01R 3126

Patent

active

054732581

ABSTRACT:
A probe apparatus comprises a housing, a probing mechanism arranged in the housing and including a supporting table for supporting an object having electrodes and movably arranged to locate the object at a measurement position, and probes which is brought into contact with the respective electrodes of the object supported by the supporting table, a load/unload mechanism arranged in the housing, for loading/unloading the object in/from the supporting table, and a downflow forming unit for forming a downflow of clean air flowing from an upper position to a lower position of the housing in every region inside the housing.

REFERENCES:
patent: 3728866 (1973-04-01), Layton
patent: 4427427 (1984-01-01), DeVecchi
patent: 4981436 (1991-01-01), Watanabe
patent: 5086270 (1992-02-01), Karasawa et al.

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