Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-01-16
1997-04-08
Nguyen, Vinh P.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324765, G01R 3106
Patent
active
056191456
ABSTRACT:
A probe apparatus including a plurality of object accommodating members each having a plurality of object accommodating portions for receiving objects to be inspected, each of the object accommodating portions having suction holes formed in an inner bottom surface thereof and used to suck the object, a cassette for containing the object accommodating members, a table on which each of the object accommodating members is to be placed, the table being movable in X, Y and Z directions and rotatable in a .theta. direction, a transfer unit for transferring each of the object accommodating members between the table and the cassette, and a detecting section having a plurality of probe needles, for electrically inspecting objects one by one which are accommodated in the accommodating member placed on the table. Further, a method for inspecting objects, including the steps of transferring from a cassette onto a table located in a detecting section, an object accommodating member which is contained in the cassette with a plurality of objects mounted thereon, and has object accommodating portions and suction holes formed in bottom surfaces of the object accommodating portions, sucking and fixing the objects on the bottom surfaces of the object accommodating portions of the object accommodating unit through the suction holes, and electrically inspecting the objects.
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Application Number 07/937,790 Inventor(s) Karasawa Filing Date Sep. 2, 1992 .
Nguyen Vinh P.
Tokyo Electron Limited
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