Probe apparatus

Details Probe apparatus Probe apparatus

1991-08-30

1993-03-30

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158F, 156647, G01R 104

Patent

active

051987554

ABSTRACT:
A probe apparatus has a quartz probe formed of a quartz probe body and a metallic pattern layer formed thereon, the quartz probe body including a plurality of probe portions having a large number of probes corresponding to an electrode array of an object of examination, lead pattern portions continuous individually with the probe portions, and a supporting portion supporting all the lead pattern portions, the quartz probe body being designed so that the longitudinal direction of each probe is inclined with respect to a crystal axis X or Y of a quartz plate by etching a Z plane of the quartz plate perpendicular to a crystal axis Z of the quartz plate, and a tester fitted with the quartz probe by means of an adapter.

REFERENCES:
patent: 4055805 (1977-10-01), Ardezzone
patent: 4585727 (1986-04-01), Reams
patent: 4585991 (1986-04-01), Reid et al.
patent: 4824073 (1989-04-01), Zdeblick
patent: 4827211 (1989-05-01), Strid et al.
patent: 4867842 (1989-09-01), Bohrer et al.
patent: 4895705 (1990-01-01), Wrighton et al.
patent: 4943719 (1990-07-01), Akamine et al.
patent: 4983908 (1991-01-01), Tada et al.
patent: 4998062 (1991-03-01), Ikeda
patent: 5020219 (1991-06-01), Leedy
patent: 5026437 (1991-06-01), Neukermans et al.
patent: 5041783 (1991-08-01), Ohta et al.

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